In order to solve the problems faced by microelectronics science and engineering or integratedcircuit design and integrated system professional experimental teaching, a virtual simulation experimentalplatform of MOS field effect transistor based on LabVIEW and TCAD is designed. The platform can realizeelectrical performance testing and parameter extraction of MOS field effect transistor.lt consists of data inputand storage ,control command output , data acquisition and display , error reporting and stopping , and graphicanalysis and extraction.The virtual simulation experiment platform provides students with a good engineeringpractice platform, with simple operation and high efficiency, which can fully mobilize students' subjectivity andhelp students understand complex problems.