@article{WANG Leini :83,
author = {WANG Leini , YANG Bo, HU Yang, HU Pengfei, LU Shibin, WANG Feifei, ZHOU Ruiyang , QlU Chen, YOU Xinyu, LIU Yibo , TAO Xiyu},
title = {
Teaching Design for Preparation of High Performance Al2O3 Dielectric Materials by Atomic Layer Deposition Method
},
publisher = {Physical Experiment of College},
year = {2024},
journal = {Physical Experiment of College},
volume = {37},
number = {5},
eid = {83},
numpages = {4},
pages = {83},
keywords = {
atomic layer deposition ;dielectric ; Al#sub#2#/sub#O#sub#3 #/sub#; teaching research
},
url = {https://dawushiyan.jlict.edu.cn/EN/abstract/article_2377.shtml},
doi = {10.14139/i.cnki.cn22-228.2024.05.016}
}